Hubert, Julie; Vandencasteele, Nicolas; Mertens, Jeremy; Viville, Pascal; Dufour, Thierry; Barroo, Cédric; Visart de Bocarmé, Thierry; Lazzaroni, Roberto; Reniers, François. 2015, October. Chemical and Physical Effects of the Carrier Gas on the Atmospheric Pressure PECVD of Fluorinated Precursors. . http://hdl.handle.net/2013/ULB-DIPOT:oai:dipot.ulb.ac.be:2013/226734.
Status of the publication: Published