Henry, Frédéric; Duluard, Corinne; Batan, Abdelkrim; Reniers, François. 2012, August. Plasma diagnostics of an Ar/NH 3 direct-current reactive magnetron sputtering discharge for SiN x deposition. . http://hdl.handle.net/2013/ULB-DIPOT:oai:dipot.ulb.ac.be:2013/183703.
Status of the publication: Published